MECHANICAL SPECIFICATION

Chuck Transfer Unit

Size

205 mm (8 inch)

Plating

Nickel

Travel X

300 mm

Travel Y

700mm

Resolution X,Y

0.05 μm

Repeatability

≤1μm

Speed

Max 500 mm/s

Travel Z

20 mm

Resolution

0.1 μm

Repeatability

≤2μm

Speed

Max10 mm/s

Rotary

360°

Resolution

≤0.005°

Repeatability

≤±0.01°

Speed

2°/s

AXIS-A6: 6 Axis motion optical probe module. (XYZ(θφψ)

Travel (X,Y,Z)

50mm

Resolution

0.05μm

Repeatability

≤ 1 μm

Speed

50mm/s

Rotary (θφψ)

±4°

Resolution

≤0.002°

Repeatability

≤ ±0.01°

Speed

2°/s